Well it is working without an error now. I believe I also disabled "Release" 
which is not a benchmark.

The working configuration now is
 ARM_HYP                          ON
 CMAKE_INSTALL_PREFIX             /usr/local
 FASTPATH                         ON
 FAULT                            ON
 HARDWARE                         ON
 IPC                              ON
 IRQ                              ON
 IRQUSER                          OFF
 KernelArmExportPMUUser           OFF
 KernelCustomDTS
 MAPPING                          ON
 MCS                              OFF
 OPENSBI_PATH                     
.../sel4bench/projects/sel4bench/../../tools/opensbi
 PLATFORM                         x86_64
 RELEASE                          ON
 SCHED                            OFF
 SIGNAL                           OFF
 SMP                              OFF
 SYNC                             ON
 Sel4benchAllowSettingsOverride   OFF
 VCPU                             ON

Running the created grub iso with qemu is working fine as well.
Just thought I update this here in case someone else runs into this problem.
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