On 1 October 2012 05:35, Kent A. Reed <[email protected]> wrote:

> It's been 40 years since I did any serious sputtering

Not quite so long for me, nearer 20, but I suspect that the equipment
was the same age.

> Typically, we had a christmas tree of aneroid gauge,
> thermocouple gauge, Pirani gauge, and Penning gauge or some such, to
> cover the pressure range, but we wore belts and suspenders:-)

I recall a valve for switching between Pirani and Penning, I also
recall that we had a mechanical roughing pump then an oil diffusion
pump which were operated in manual sequence.
Much more recently I worked for an X-ray microscope maker (nice toys:
http://www.nordson.com/en-us/divisions/dage/products/ExampleProductFamily/Pages/CTOption.aspx
the picture there shows in-situ BGA balls and bond-wires.) and I was
amazed how simple it now was. Just one turbomolecular pump achieved
vacuums unheard-of with the diffusion pump, and without spending
hundreds on diff pump oil on a regular basis.

http://en.wikipedia.org/wiki/Turbomolecular_pump seems to suggest that
you still need a backing pump, it is possible that this was built-in
to the TM pump on the X-ray tubes.
(I didn't pay that much attention, as I was working on the development
of a sealed-for-life version of the tube)

> As my grandkids grow, I feel the itch to have a vacuum bench in the
> basement for "Ask Mr Wizard" kinds of experiments. Anything so long as
> it doesn't generate X-rays.

But X-rays are fun!

-- 
atp
If you can't fix it, you don't own it.
http://www.ifixit.com/Manifesto

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