I am using a Zygo Mesa laser interferometer to measure the radius of
curvature in silicon wafers. I save the data as a binary file and open it in
Gwyddion, go to 'Data Process' and select 'Curvature'. I think I've
convinced myself that the option to 'Include only masked region' is the one
I want, this will only include the actual data and exclude the area outside
the circle. Is this correct?

I noticed that I get different values for the radius of curvature if I
'Shift minimum data value to zero'. Is this expected?

-- 
Jonathan Abbott

If people never did silly things, nothing intelligent would ever get done.
     - Ludwig Wittgenstein
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