XRD information about the Ti-Cr-N film on Si-substrate?

[Eui-Suk Park]

Hi, everyone?
I am looking for any XRD information about the the Ti-Cr-N film on
Si-substrate.
this material is potentially  important as a shape-memory applications.
of course in JCPDS, i couldn't find about this material.
In advance, I appreciate your help.
bye.