At 01:17 PM 9/2/2010, Mark J. Blair wrote:
Back in college, I took a semiconductor device physics course which
included a lab where we made simple ICs (the most complex devices
were SR latches). We had a vapor deposition system for plating on
gold or aluminum, which pumped the chamber down below 10E-12 Torr as
I recall, within ten minutes or so after a clueless freshman opened
the beast up and tossed in a bit of aluminum or gold wire and a few
chunks of silicon with their grubby hands (ok, we used tweezers, but
still...). The whole unit was about as big as a refrigerator or two.
It used a rotary-vane roughing pump and an oil diffusion pump with a
liquid nitrogen trap. This was about 25 years ago.
I think I took that same class (sub-basement of Steele, right?) just
a few years after you.
--
newell N5TNL
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