> Indeed there is an physical limitation for the Q of piezoelectric
> resonators, which is given by phonon interactions etc. For quartz this
> limit is given approximately by Q*f = 15E12. See attached graph (sorry, in
> German).


NIce figure! Here's a similar one for MEMS resonators (mostly Si I think)
in a paper by Ghaffari et al. from 2013:
http://www.nature.com/articles/srep03244
>From the figure it looks like the MEMS resonator for on a line Q*f = 5e12

Anders
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