SharememPath (aka FcgidProcessTableFile) defaults to /var/lib/apache2/fcgid/shm.
Does /var/lib/apache2/fcgid exist on your system and is owned by www-data?

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https://bugs.launchpad.net/bugs/1266400

Title:
  Apache2 fails to start with libapache2-mod-fcgid: No such file or
  directory: mod_fcgid

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