I guess you're in Squeeze or probably Lenny, right?
Remove everything nvidia-related (source packages, modules built or
installed, non-free binary drivers, etc.), activate sid in your
sources.list, and then try again. Be sure to have the correct kernel
headers available by doing m-a prepare for the proper kernel (which is
now the same in both squeeze and sid). Then try installing from sid. I
had the same problem as yours. The build process failed without any
understandable errors but when I used the packages in sid it worked like
a charm.
First install headers for you kernel, then activate sid if not already
activated, then go through downloading and building the module with
module-assistant. Then install nvidia-glx (from sid) if it does not get
installed during the process of module building and installing. The
nvidia-settings and nvidia-xconfig packages can also be very useful.
Nima :)
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