The plot is very similar to the ST Microelectronics one described in www.st.com/st-web-ui/static/active/en/resource/.../DM00103199.pdf

That puts the peak down to Helmholtz resonance in the chamber air cavity.

Chris Woolf

On 14-Apr-16 11:04, Jörn Nettingsmeier wrote:
On 04/13/2016 04:25 PM, Marc Lavallee wrote:

I'm looking at this product here:
http://www.invensense.com/products/analog/ics-40300-3/

Thanks for posting it, that's the first time I see actual plots of a MEMS microphone. Can anyone explain the reason for the horrible peak at 15k? Is is possible to linearize it to get a useful response above 10k, or does it come with extreme ringing that would make it unusable?

Always good to learn about up and coming new technologies, but for this one I'm dusting off and waxing my ten-foot pole...





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